レーザー加工機およびシステム

エキシマビーム伝送ビーム伝送オプティクス

Superior quality optics matched to the unique combination of high pulse energy, short UV wavelengths, and high power.

Many applications for excimer lasers need delivery optics – for projecting, homogenizing, and/or attenuating the beam. Coherent uses an unmatched combination of experience and technical knowledge to create optomechanical tools for this challenge. 

Excimer Beam Delivery Optics - Overview

Simplify your excimer laser application with standard and custom beam delivery optics and optomechanical modules.

 

製品仕様

製品タイプ

主な特徴

Attenuators 

Variable attenuator includes compensator plate to eliminate beam walk-off 

Homogenizers

Generates 5x5 mm or 10x10 mm uniform field with <± 5% variation 

Projection Lenses 

5X or variable 4-10X demagnification with higher values on request