光学
Lithium Niobate Wafers
Use Lithium Niobate's unique combination of high refractive index and visible and infrared transmission to makes waveguides, modulators, and sensors on our wafers.
Lithium niobate is a multifunctional material with high chemical and heat stability. Its high refractive index (>2.3) compared with glass (1.5) enables a large field-of-view when fabricated in wafer form for waveguide design.
ニオブ酸リチウムウェハー
Depend on Coherent, with over a decade of experience in Lithium Niobate wafer manufacturing, to provide wafers that meet your exact requirements.
材料仕様 |
|
素材 |
Congruent: LiNbO3 |
Material quality |
Bubble or inclusion <100 μm Qty <8, 30 μm < bubble size < 100 μm |
オリエンテーション |
Y cut ±0.2° |
密度 |
4.65 g/cm3 |
Curie temperature |
1142 ±1℃ |
透明性 |
>95% for 10 mm thickness over 450 - 700 nm |
製造仕様 |
|
直径 |
150 mm ± 0.2 mm |
厚さ |
350 μm ± 10 μm |
Flatness Total thickness variation(TTV) Local thickness variation (LTV) Bow Roughness |
<1.3 μm Warp < 70 μm @ 150 mm wafer <70 μm @ 150 mm wafer Rq ≤0.5 nm (RMS value by AFM) |
表面品質 |
40-20 |
Particles |
Non-removable particles: 100-200 μm ≤3 particles, 20-100 μm ≤20 particles |
Chip |
<300 μm (full wafer, without exclusion zone) |
Crack |
No crack (full wafer) |
Contamination |
No non-removable stain (full wafer) |
Parallelism |
<30 arc second |
Orientation refer flat (x-axis) |
47 ±2 mm |
関連製品
光学製造能力
Coherent材料成長、加工、コーティング、組立までの垂直統合型体制と、厳格な品質保証（QA）についてご紹介します。これらが当社の光学部品の性能と信頼性を確保し、サプライチェーンのリスクや不確実性を最小限に抑える仕組みをご覧ください。
